Calibration and Uncertainty Analysis of Scanning Electron Microscope Length Measurement Error

Yi Yang; Tao Wang; Yuzhou Chang; Wei Zhang; Jiajun Tang

doi:10.54097/pga99876

Authors

Yi Yang
Tao Wang
Yuzhou Chang
Wei Zhang
Jiajun Tang

DOI:

https://doi.org/10.54097/pga99876

Keywords:

Metrology, scanning electron microscope, length measurement error, equidistant grid standard template, uncertainty in measurement

Abstract

Based on the calibration method of scanning electron microscope length measurement error based on equidistant grid standard template, establish an evaluation model for measurement uncertainty and analyze the sources of various uncertainties. Based on measurement examples, this paper elaborates on the process of evaluating the measurement uncertainty of length indication error in scanning electron microscopy based on equidistant grid standard templates, calculates its extended uncertainty, and provides a reference for evaluating the measurement uncertainty of length indication error in scanning electron microscopy based on equidistant grid standard templates.

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